Sputtering (DC/RF)

• Three source magnetron sputtering system capable of producing multilayer films without ever having to break UHV.
• RF sputtering (13.56 MHz) is available for depositing highly insulating materials.
• Substrate rotation ensures high deposition uniformity.
• Typical substrate sizes are 2”, 3”, and 4” diameters, however custom sizes and shapes can also be accommodated.
• Please inquire about substrate heating/cooling.

Deposition services can be requested through our simple Request for Quotation form. Gold and silver coated substrates are available in the Online Store.