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Electron Beam Evaporation

Four pocket, 15 cc electron beam source capable of producing multilayer films without ever having to break UHV.

Substrate rotation ensures high deposition uniformity.

Typical substrate sizes are 2”, 3”, and 4” diameters, however custom sizes and shapes can also be accommodated.

Please inquire about substrate heating/cooling.

Looking for custom substrates or coatings?

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